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Study of Supercritical Carbon Dioxide/n-Butyl Acetate Co-solvent System with High Selectivity in Photoresist Removal Process
Kim DW  Heo H  Lim KT
Vol. 23, No. 4, pp. 357-363, Dec. 2017
10.7464/ksct.2017.23.4.357

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지